DUV coherent light sources
Efficient DUV coherent light sources
Efficient DUV coherent light sources
DUV coherent light sources are critical for various applications such as nanolithography, biomedical imaging, and spectroscopy. We designed, nanofabricated, and measured tunable DUV light sources, with strong coherent properties, and the possibility to control chirality of the emitted light using high Q-factor metasurfaces supporting bound states in the continuum.